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G. Kim
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Proceedings Papers
ISTFA2005, ISTFA 2005: Conference Proceedings from the 31st International Symposium for Testing and Failure Analysis, 407-412, November 6–10, 2005,
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As DRAM technology extends into 12-inch diameter wafer processing, plasma-induced wafer charging is a serious problem in DRAM volume manufacture. There are currently no comprehensive reports on the potential impact of plasma damage on high density DRAM reliability. In this paper, the possible effects of floating potential at the source/drain junction of cell transistor during high-field charge injection are reported, and regarded as high-priority issues to further understand charging damage during the metal pad etching. The degradation of block edge dynamic retention time during high temperature stress, not consistent with typical reliability degradation model, is analyzed. Additionally, in order to meet the satisfactory reliability level in volume manufacture of high density DRAM technology, the paper provides the guidelines with respect to plasma damage. Unlike conventional model as gate antenna effect, the cell junction damage by the exposure of dummy BL pad to plasma, was revealed as root cause.
Proceedings Papers
ITSC 2005, Thermal Spray 2005: Proceedings from the International Thermal Spray Conference, 1075, May 2–4, 2005,
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Thermal sprayed WC-metal binder cermet coating is widely used for their resistance to abrasive wear in various harsh environments and generally sprayed by high velocity oxy-fuel (HVOF) method and atmospheric plasma spray method (APS). However, even during HVOF spraying, WC-metal binder cermet powder has to be exposed to high temperature flame jet for heating and accelerating, furthermore, oxygen is usually entrained into the flame jet, the decomposition and decarburization of tungsten carbide owing to the oxidation of WC, cannot be totally eliminated. This frequently causes defects such as pores, cracks and unmelted particles, which deteriorate coatings properties. To improve the properties of sprayed coatings, numerous studies have been examined post treatments such as laser irradiation, diffusion treatment, hot isostatic pressing (HIP) treatment, sealing treatment. Laser irradiation was speedy treatment and simplicity of process control and enables not only the post treatment but also the pre and simultaneous treatment by combining with spraying process. However, it is not easy to produce a uniformly treated coating by conventional laser treatment method as desired. To obtain a near-uniform beam intensity for practical laser irradiation, a kaleidoscope was installed in a conventional YAG laser. In this work, laser beam properties of YAG laser equipped with a kaleidoscope and its effect on surface modification of WC-25%NiCr coating was investigated. Abstract only; no full-text paper available.
Proceedings Papers
ITSC1998, Thermal Spray 1998: Proceedings from the International Thermal Spray Conference, 1645-1650, May 25–29, 1998,
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Zirconia-based thermal barrier coatings (TBCs), produced using Vacuum Plasma Spray (VPS) technology, were recently subjected to burner rig testing. The VPS TBC performance was compared to TBCs deposited using conventional Atmospheric Plasma Sprayed (APS) and Electron Beam Physical Vapor Deposition (EB-PVD) techniques. All of the coatings consisted of an MCrAlY bond coat and a partially stabilized ZrO 2 -8%Y 2 O 3 (PSZ) top coat. The TBC coated pins (6.35 mm in diameter) were tested using gas temperatures ranging from 110CC to 1500°C. The pins were tested to failure under severe conditions (1500°C gas temperature, with no internal cooling). The initial testing indicated that under typical operating gas temperatures (1400°C), the VPS TBC performance was comparable, if not superior, to conventional TBCs. Following the encouraging results, thick composite TBCs, produced in a single-step operation, were investigated. Preliminary work on ZrO 2 -8% Y 2 O 3 /Ca 2 SiO 4 composite TBCs with interlayer grading included thermal shock testing and temperature drop measurements across the TBC. The composite TBC thicknesses ranged from 850µm to 1.8 mm. Initial results indicate that thick adherent composite TBCs, with high resistance to severe thermal shock, can be produced in a single step using the VPS process.