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David Goulet
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Proceedings Papers
ISTFA2014, ISTFA 2014: Conference Proceedings from the 40th International Symposium for Testing and Failure Analysis, 296-298, November 9–13, 2014,
Abstract
View Papertitled, Methods to Reconstruct SEM and Optical Probe Tips Using a FIB Tool
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for content titled, Methods to Reconstruct SEM and Optical Probe Tips Using a FIB Tool
Various electrical probing and nano probing solutions are offered for semiconductor or failure analysis labs. Using a focused ion beam (FIB) instrument, it is possible to make modifications to probe tips used in optical and SEM probe stations for improved ohmic contact and probe tip durability. The other added benefit is cost reduction by being able to reconstruct damaged tips. This paper shows various FIB techniques and compares reconstructed tip performance with new probe tips.