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Chris Deeb
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Proceedings Papers
ISTFA2010, ISTFA 2010: Conference Proceedings from the 36th International Symposium for Testing and Failure Analysis, 301-303, November 14–18, 2010,
Abstract
View Papertitled, Energy-Dispersive X-ray Spectrometry Performance on Multiple Transmission Electron Microscope Platforms
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for content titled, Energy-Dispersive X-ray Spectrometry Performance on Multiple Transmission Electron Microscope Platforms
Energy-dispersive X-ray spectrometry (EDS) is a key analytical tool aiding root cause determination in the failure analysis (FA) process. This paper looks at a number of analytical TEM microscopes currently in use in various facilities: microscope A, a STEM operated at 200kV; microscope B, a 300kV TEM; and microscopes C and D, both 200kV TEMs. EDS counts per unit time from multiple microscope platforms were examined. Microscope D demonstrated two orders of magnitude higher counts per unit time than the other three microscopes. Microscope D represents the state-of-the-art EDS analytical TEM configuration and has achieved this through a novel windowless EDS configuration which significantly increases the detector area (by about a factor of three) that receives X-rays generated from the sample.