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Blake Freeman
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Journal Articles
Journal: EDFA Technical Articles
EDFA Technical Articles (2023) 25 (4): 28–34.
Published: 01 November 2023
Abstract
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A scanning electron microscope system measures voltage contrast on device-under-test surfaces. This article addresses a limited set of applications that rely on voltage contrast (VC) measurements in SEM systems, showing how VC measurements can probe electrical activity running at speeds as high as 2 GHz on modern active integrated circuits.
Proceedings Papers
ISTFA2022, ISTFA 2022: Conference Proceedings from the 48th International Symposium for Testing and Failure Analysis, 125-128, October 30–November 3, 2022,
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Recently, electron beam probing (EBP) has had a resurgence in failure analysis communities due to its clear resolution advantage compared to optical techniques. This paper describes an approach for a detailed advanced logic e-beam probing system, capable of measuring both high bandwidth waveforms and frequency maps. An investigation of optimizing the signal-to-noise of the pulsed beam is presented. By minimizing the working distance and the use of quadrature signal analysis, the e-beam prober is capable of high bandwidth and high-resolution data with adequate signal-to-noise. The use of such system provides a scalable solution for electrical failure analysis for advanced logic integrated circuits.
Proceedings Papers
ISTFA2019, ISTFA 2019: Conference Proceedings from the 45th International Symposium for Testing and Failure Analysis, 197-203, November 10–14, 2019,
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We report on using the voltage-contrast mechanism of a scanning electron microscope to probe electrical waveforms on FinFET transistors that are located within active integrated circuits. The FinFET devices are accessed from the backside of the integrated circuit, enabling electrical activity on any transistor within a working device to be probed. We demonstrate gigahertz-bandwidth probing at 10-nm resolution using a stroboscopic pulsed electron source.