Thermoelectric (TE) power generation from waste heat is recently attracted much attention as one of energy-saving technologies. In this paper, Co-doped n-type iron silicide semiconductor was plasma sprayed under various spray conditions to find the optimum spray-forming conditions. Then Co-doped iron silicide TE device with thickness ranging from 3 to 5 mm and the area of over 100 cm square was produced in the form of a plate or on tube. The paper examines the microstructure and evaluates thermal and electric properties. Paper includes a German-language abstract.