In this study, yttria films with high thermal shock resistance were synthesized from a metal-EDTA complex by means of combustion flame spraying. A rotating stage and various cooling agents were used to control substrate temperature during deposition. Although thermally extreme environments were employed during synthesis, the obtained films showed only a few cracks and some minor peeling in their microstructures. In the case of a Y2O3 film synthesized using substrate rotation and water atomization, the porosity was found to be 22.8% and the temperature of the film immediately after deposition was 453 °C, owing to a high heat of evaporation in the cooling water.

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