This study investigates the influence of particle temperature and velocity during reactive plasma spraying and the effect of plasma gases on coating properties. Using hydrogen gas with low flow rate was found to be better for reactive plasma spraying of fine Al2O3-AlN mixtures. The H2 gas increased in-flight particle temperature, affecting in-flight vaporization, AlN content, phase transformation, deposition efficiency, and coating thickness. N2 gas, on the other hand, increased particle velocity, thereby reducing particle residence time in the plasma, which affects melting, nitride conversion, and phase transformation.

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