This study investigates the feasibility of spraying aluminum nitride-alumina-yttria mixtures in a nitrogen plasma ambient. Coatings consisting of h-AlN, c-AlN, Al5O6N, and γ-Al2O3 with small amounts of α-Al2O3 and aluminum-yttrium oxide phases were produced. Although using the Y2O3 additives significantly affected the process and microstructure, it did not achieve the high thermal conductivity desired in as-sprayed coatings. However, a high thermal conductivity (>90 W/m·K) AlN coating was fabricated by increasing the AlN content and enhancing sintering during heat treatment.

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