Vacuum kinetic spray (VKS) is a relatively new coating process by which dense, low porosity nanostructured ceramic coatings can be produced. Titanium nitride films with thickness of 0.5-5 µm on glass were fabricated by VKS method for a mechanism and microstructure study. Deposition behavior and structure with different gas consumption and gun traverse speed were studied based on X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM). The as-deposited titanium nitride film consisted of ~20 nm grains is well condensed and expected to have excellent mechanical properties.

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