Sub-micro-structured titanium nitrides (TiN) coatings on Al2O3 substrates were fabricated by vacuum cold spray (VCS) process using ceramic powders, which were ball-milled at room temperature. The microstructure features and crystal structures of the VCS TiN coatings were analyzed by scanning electron microscopy and X-ray diffraction. The adhesion between the coating and the substrate was evaluated with a scratch tester. The sheet resistance of the VCS TiN coatings was measured by using a four-point probe method. The effects of nozzle traverse speed on the microstructure, adhesion to substrate and electrical properties of the coatings were investigated. It was found that the adhesion improves greatly with the nozzle traverse speed increasing from 5 to 15mm/s, and the electrical resistivity levels of the coatings is decreased significantly. The resistivity of sub-micron-structured TiN coatings is substantially lower than those of nano-structured ones fabricated by the same VCS process. And a minimum resistivity of 1.16×10-4 Ω·m is achieved.