Mathematical and computer models of movement and heating of particles in low pressure conditions are developed. The mathematical models are based on the molecular-kinetics theory of gases. A program complex for computer realization of models is developed. It contains a built-in data base of temperature dependent properties of substances, system of processing and graphic visualization of simulation results. For verification of the developed models, computer simulation and experimental measurements of Al2O3 particle temperature and velocity are conducted. These materials were sprayed with Plasma-Technik equipment at pressure 60 mBar in argon. Particle velocity was measured with a special optical device, particle temperature was defined by intensity radiation method. It was established that the developed models are adequate to real process (error of 5-8 %) and may be used for study and improvement of VPS processes.