A model for oxidation of molybdenum particles during plasma spray deposition is developed. The diffusion of metal an-ions or oxygen cat-ions through a thin oxidized film, chemical reactions on the surface, and diffusion of oxidant in gas phase are considered as possible rate-controlling mechanisms with controlling parameters as the temperature of the particle surface, and local oxygen concentration and flow field surrounding the particle. The deposition of molten particle and its rapid solidification and deformation is treated using a Madejski-type model, in which the mechanical energy conservation equation is solved to determine the splat deformation and one-dimensional heat conduction equation with phase change is solved to predict the solidification and temperature evolution. Calculations are performed for a single molybdenum particle sprayed under the Sulzer Metco-9MB spraying conditions. Results show that the mechanism that controls the oxidation of this droplet is the diffusion of metal/oxygen ions through a very thin oxide film. A higher substrate temperature results in a larger rate of oxidation at the splat surface, and hence, a larger oxygen content in the coating layer. Compared to the oxidation of droplet during m-flight, the oxidation during deposition is not weak and can become dominant at high substrate temperatures.