Diagnostics on a Thermal RF Plasma Process used for the Evaporation of Zirconia Powders

This paper investigates the problem of complete evaporation of zirconium oxide powders that are injected into a thermal RF plasma. Particle trajectories and evaporation are studied using optical emission spectroscopy and laser Doppler anemometry. Model calculations are compared with the results of process diagnostics. It is observed that axial emission profiles confirm the influence of the particle size on the evaporation behavior. Paper includes a German-language abstract.