A diameter of 30 mm polycrystalline diamond film has been deposited by magnet-enhanced DC plasma jet CVD. The diamond film was characterized by X-ray diffraction, Raman spectroscopy, scanning electron microscopy and surface profilograph. Results reveal that under the same depositing parameters, magnetic field can increase purity of diamond film, improve thickness uniformity of diamond film, but no influence on crystal perfection and size of microcrystal of diamond film. A discussion on magnetic effect is presented.

diamond film, magnet-enhanced DC plasma jet CVD, magnetic field strength, Raman spectroscopy, surface profilograph, X-ray diffraction
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Copyright © 1996 ASM International. All rights reserved.
1996
ASM International
Topics
Diamond Plasma-enhanced chemical vapor deposition Magnetic field strength Raman spectroscopy X-ray diffraction
Issue Section:
Emerging Processing Systems
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