This paper describes a method for producing textured surface layers on vacuum chamber components that act as particle traps. The novel textures consist of a stainless steel core produced by direct energy deposit laser cladding covered with a twin-wire arc sprayed aluminum film. The process has been qualified for 20 nm and older IC architectures and is now implemented in production equipment. It has been proven to significantly increase preventive maintenance intervals, reduce particle levels, and enhance yield.

316L-SI stainless steel, laser cladding, particle traps, PVD systems, twin wire arc spraying
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Copyright © 2019 ASM International. All rights reserved.
2019
ASM International
Topics
Austenitic stainless steel Commercially pure aluminum Laser cladding Electric arc spraying Semiconductor wafer fabrication
Issue Section:
Protective Coatings - Corrosion
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