Adhesion strength is one of the most important characteristics when discussing the reliability of a cold spray. A focused ion beam (FIB) was used to conduct ultra-micro tensile tests for micro-scale adhesive strength evaluations of high-pressure type cold-sprayed copper deposition on an aluminum substrate. It was also used to determine the essential factor of adhesion strength and the coating formation mechanism. The micro-scale local adhesion strength of cold-sprayed copper deposits on an aluminum substrate was successfully evaluated by FIB microtensile tests. The average local adhesion strength of this deposit was 223 MPa. The variations in adhesion strength between deposit and substrate were smaller than the interfacial strength of cold-sprayed deposits. This was caused by the repeated collision of these subsequent particles.

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