Ceramic layers, such as yttria-stabilized zirconia or scandia-stabilized zirconia, used for functional layers of solid oxide fuel cells, i.e. the gas tight oxygen ion conductive electrolyte or as ceramic component in the porous cermet anode, were obtained by the Solution Precursor Plasma Spray (SPPS) process. The influence of different solvent types on microstructure was analyzed by comparison of coatings sprayed with water-based solution to ethanol-based one. Use of solvent with low surface tension and low boiling point enhances splat formation, coating microstructure and crystalline structure. Parameter adjustment to receive coatings from nitrate solutions with ethanol as solvent was carried out. Results of Raman spectroscopy indicate that an intermediate of both nitrates (zirconyl and scandium nitrate hydrate) was deposited.