Influence of Powder Properties and Plasma Spray Conditions on Erosion Resistance of Yttrium Oxide Coatings against Halogen Plasma for Dry Etching Process in Semiconductor and Electronic Applications Available to Purchase

This study investigates the influence of plasma spray conditions on the structural, mechanical, and plasma-erosion properties of yttrium oxide coatings. Powder feed rate, plasma power, and primary particle size appear to have little effect on plasma erosion properties, hardness, surface morphology, and coating structure. However, a Y₂O₃ coating produced with fine powder retained a smooth erosion surface despite its porosity and relatively low hardness.