The integrated model of thermofluid, splat formation and coating formation for a cold spray process has been established. The in-flight behavior of micro and submicron particles, the interaction between shock wave and particles in a supersonic jet impinging onto the substrate are clarified by this integrated model in detail. Then, the effect of electrostatic force on the particle acceleration is discussed in detail by carrying out a real-time computational simulation. It is shown that coating can be formed with the assist of electrostatic acceleration even though there is a lack of particle acceleration over critical velocity only through momentum transfer from airflow. Thus, the utilization of electrostatic acceleration enhances the performance of cold spray coating and contributes the extension of application range of a cold spray process.