Demands on functional coatings with high dimensional accuracy and high surface quality has led to increasing interest in processing of very fine powder grades in a particle size range < 25 µm. Fine powders are not only showing a distinct potential for application of thin and dimensionally accurate coatings, but are also very promising for the production of dense and homogeneous coatings with improved mechanical properties. The large specific surface of fine powders is allowing for relatively low thermal energy levels that are introduced into the process. Nevertheless this also requires a very sensitive temperature control, to prevent overheating of the particles. The reduction of the thermal energy level is resulting in significant advantages particularly for the usability of the HVOF process for coating of inner diameters. Within this work in-flight particle properties of ultrafine carbide powders were analyzed. The studied HVOF process allows the adjustment of a broad parameter range by utilization of a hydrogen stabilized liquid fuel combustion process. A conventional straight nozzle type as well as a curved nozzle for internal spraying was studied. For a further assessment of the potential of ultrafine carbide powders also spray trials with a plasma spraying system have been made.