A consistent thermal and chemical non-equilibrium model for inductive supersonic plasma flow, developed recently, is applied to the modelling of pure argon supersonic plasma flow, which impinges on a substrate below the Mach 1 nozzle. The model considers the ionization of argon atom and the corresponding recombination but the second order ionization is ignored and plasma charge neutrality is assumed. The transport and mass diffusion coefficients are computed using the collision cross-section data, published by Devoto and Murphy and the computations of transport properties are fully coupled with the calculation of the plasma flow fields. The model treats the subsonic discharge region above the supersonic nozzle and the supersonic region below the nozzle together. Two different turbulent models are incorporated into the model to describe the supersonic plasma flow. The modeled radial and axial profiles of electron and heavy species temperatures and electron number densities near the substrate are then compared to those measured by the method of optical emission spectroscopy and finally the most realistic model is identified.

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