The system studied in this work is based on a Gadolinia-doped Ceria (GDC) matrix and a Nickel oxide cermet as the anode material where both layers are RF plasma deposited. The challenge lies in the optimization of the anode deposition parameters to obtain a controlled porosity thick layer and to process the electrolyte material in such a way as to completely eliminate both open and closed porosity in the relatively thin deposit. The starting materials were nitrate based solutions, prepared so as to obtain final anode spray deposits of NiO-GDC (35%Wt) with the aimed for electrolyte composition of Gd0.2Ce0.8O1.90. In order to optimize these anode deposits, the plasma power, the “stand off” distance, the concentration of the salts solution, as well as substrate cooling, were studied. Similar parameters were also studied for the electrolyte deposition process but, in order to assure attaining high deposit density, the supersonic RF torch nozzle was used for the spray processing. The interactions between all of these parameters and their influence on the deposition process, for both the anode and the electrolyte layers, is examined and discussed.