Precursor Plasma Spraying (PPS) using Radio Frequency (RF) induction plasma spray is a new process used to synthesize functional materials. RF plasma spray has the advantages of stability, cleanness, high temperature and high chemical reactivity. In this paper, a two-dimensional numerical model has been developed to investigate the induction electromagnetic (EM) field and the thermo-fluid field in a radio frequency inductively coupled plasma (RF-ICP). In flight particle interaction with the plasma jet will be investigated. The traditional micron-size powder particles, e.g. zirconia (PSZ), are injected with carrier gas such as argon. During their interaction with the RF plasma, the powder particles experience acceleration, heating, melting and evaporation and particle heat transfer is considered coupled with the thermo-fluid flow of the RF plasma. A generalized particle model is developed and applied to the precursor plasma spray process operated in a vacuum chamber. The effects of power input, standoff distance and powder size on the RF plasma and particle in flight characteristics are investigated.