Numerical simulation of a plasma spraying process from ceramic particle injection to a coating formation was conducted by integrating particle-laden plasma flow, ceramic splat formation and coating formation models. Velocity and temperature of both plasma flow and ceramic particles under an applied RF electromagnetic field were clarified by using the first model. Radial distributions of particle impact location, velocity and temperature were obtained based on both an unsteady effect of a plasma flow and distributions of particle size and injection velocity. Nextly, splat thickness and diameter of melted ceramic particles after impact on a substrate were clarified by using the particle impact velocity and temperature. Radial distributions of splat thickness and diameter became more uniform. Finally, coating thickness distributions were evaluated by using the last model. They were strongly influenced by particle size and injection velocity distributions.