Plasma spraying of aluminum oxide is attracting great interest as a method for depositing economical coatings for use in the semiconductor equipment industry. The microstructure and mechanical properties of the sprayed aluminum oxide coatings are critical to the coating usage in the semiconductor equipment application. The influence of powder size on the coating microstructure and mechanical properties for coatings used in this industry is investigated.

This content is only available as a PDF.
You do not currently have access to this content.