Abstract
Plasma spraying of aluminum oxide is attracting great interest as a method for depositing economical coatings for use in the semiconductor equipment industry. The microstructure and mechanical properties of the sprayed aluminum oxide coatings are critical to the coating usage in the semiconductor equipment application. The influence of powder size on the coating microstructure and mechanical properties for coatings used in this industry is investigated.
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Copyright © 2003 ASM International. All rights reserved.
2003
ASM International
Issue Section:
Applications
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