Plasma spraying of aluminum oxide is attracting great interest as a method for depositing economical coatings for use in the semiconductor equipment industry. The microstructure and mechanical properties of the sprayed aluminum oxide coatings are critical to the coating usage in the semiconductor equipment application. The influence of powder size on the coating microstructure and mechanical properties for coatings used in this industry is investigated.

aluminum oxide coatings, mechanical properties, microstructure, plasma spraying, semiconductor equipment application
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Copyright © 2003 ASM International. All rights reserved.
2003
ASM International
Topics
Microstructure Alumina ceramics Plasma spray coating Mechanical properties
Issue Section:
Applications
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