This paper presents the details of the manufacturing process and properties of the micro discharges equipment as well as their performance. Micro discharges, based on miniaturized hollow cathodes, could be of interest for the development of efficient and inexpensive light sources. Micro discharge excimer lamps are quasi-monochromatic light sources, which can be operated over a wide range of wavelengths in the ultraviolet and vacuum-ultraviolet. Excimer sources utilize the formation of excited molecular complexes and the change from the bound excimer state to a repulsive ground state. The radiant power of the plasma sprayed excimer lamps can be significantly higher than for commercially available lamps. Further investigations have to be performed with respect to lifetime of the excimer lamp. Possibilities to reduce degradation and erosion of the structure have to be developed. Paper includes a German-language abstract.

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