Abstract

The denser structure of HVOF-sprayed aluminum layers compared to APS-sprayed ones opens up high-quality application possibilities, especially in the form of electrical layers in semiconductor applications. This paper presents the effect of fuel gas/oxygen ratio on melting level of the particle, total gas flow, and particle flux in terms of coating thickness per pass on the electrical properties of the coatings. A large number of spray parameters are changed for more detailed investigations. Splats are created to investigate the relationship between diagnostic data, melting behavior, and the interactions between droplets and substrate in the case of aluminum particles. Paper includes a German-language abstract.

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