In this paper, titanium layers with different titanium nitride phases are deposited with variation of the process parameters using the reactive gas plasma spraying process. The layers are characterized with X-Ray Diffraction, light microscopy, Scanning Electron Microscopy, and the Vickers hardness measurement method. Using statistical methods based on Design of Experiments, the influence of the coating parameters on the coating properties is investigated. Quantitative relationships between the nitrogen concentration in the plasma gas, the nitrogen pressure in the spray booth, the substrate temperature during coating, and the layer properties of the nitrogen concentration, hardness, and porosity, are demonstrated. It is observed that the values of all the layer characteristics mentioned increased with an increasing content of nitrogen in the plasma gas or the atmosphere. Paper includes a German-language abstract.