Microplasma spraying is characterized by a number of advantages, which enable the expansion of the areas of application of plasma spraying for the production of functional coatings. The low heat input on the substrate material allows the coating of small and thin-walled components without undesired overheating or deformation. Due to the small plasma jet, powder losses are lower when coating small components. This paper investigates the influence of the operating conditions of the plasmatron on the spraying of molybdenum, stainless steel, WC-Co, zirconium dioxide, and aluminum oxide using an MPS-003 system. The material consumption, the plasma jet size, and the layer structure are measured in a cross section during the investigations. Online measurements are carried out using the DPV-2000 system when spraying stainless steel 316L, zirconium dioxide, and aluminum oxide. Paper includes a German-language abstract.