Synthesis of Ceramic Layers for Solid Oxide Fuel Cells by Means of TPCVD

This paper investigates the potential of radio frequency thermal plasma chemical vapor deposition for producing Sr-doped La-Mn-perovskite and yttria-doped zirconia layers for solid-oxide fuel cells. Aqueous solutions were used as starting materials and were injected into the hot plasma core by means of an air-assist atomizer. Test results show how the microstructure, dopant distribution, and phase purity of the resulting layers depends both on process conditions and the material system. Paper includes a German-language abstract.