Materials researchers discovered a series of promising oxide ceramic materials to serve for example in the field of solid oxide fuel cells (SOFC). This paper investigates the potential of the chemical vapor deposition (Thermal Plasma Chemical Vapor Deposition) supported by thermal high-frequency plasma for the deposition of Sr-doped La-Mn-Perovskite cathodes and Yttria-doped zirconia (YSZ) to demonstrate electrolytes of the SOFC. Aqueous solutions that evaporate completely in the plasma are used as starting materials. The microstructure of the layers produced depends on the position in the plasma jet at which the critical supersaturation of the precursor vapor is exceeded. Globular or stalky layers with growth rates of up to 30 micrometer/min are deposited. The homogeneity of the dopand distribution and the phase purity of the layers are excellent in the case of the YSZ. However, they have to be further improved for the perovskite layers through process modifications. Paper includes a German-language abstract.