Ultrafine MoSi2 powders have been synthesized from commercial MoSi2 powders by using an Ar-H2 induction plasma. Reactor pressure and plate power were taken as the experimental parameters to optimize the phase as well as the size distribution of ultrafine MoSi2 powders. The powders were collected from porous metal fibers. They were composed of both metastable hexagonal structure (β-MoSi2) and stable tetragonal structure (α-MoSi2) with small levels of Mo5Si3 and free silicon.

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