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ISTFA2021, ISTFA 2021: Conference Proceedings from the 47th International Symposium for Testing and Failure Analysis, 146-149, October 31–November 4, 2021,
...Abstract Abstract This paper evaluates the use of nanomilling and STEM imaging to analyze failure mechanisms in sub-50 nm InP HEMTS. The devices were life tested at elevated temperatures and biases and their electrical characteristics were measured at each stress interval. Devices that were...