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ISTFA2021, ISTFA 2021: Conference Proceedings from the 47th International Symposium for Testing and Failure Analysis, 211-216, October 31–November 4, 2021,
... the mapping routine can be optimized to detect extended crystalline defects in III/V layers, selectively grown on shallow trench isolation patterned Si wafers. III/V layer crystalline defects electron channeling contrast imaging epitaxial films nano-ridge structure ISTFA 2021: Proceedings from...