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liquid metal alloy ion source

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Proceedings Papers

ISTFA2024, ISTFA 2024: Conference Proceedings from the 50th International Symposium for Testing and Failure Analysis, 188-190, October 28–November 1, 2024,
... Abstract Advanced nanoscale material characterization requires high lateral resolution and sensitivity. This paper presents a novel analytical system that integrates a liquid metal alloy ion source (LMAIS), magnetic sector secondary ion mass spectrometry (SIMS), and laser interferometer stage...
Proceedings Papers

ISTFA2022, ISTFA 2022: Tutorial Presentations from the 48th International Symposium for Testing and Failure Analysis, n1-n76, October 30–November 3, 2022,
... in Source Technology for Focused Ion Beams by Smith, Notte, Steele. MRS Bulletin 39, 2014. Periodic Table of Available FIB Species = LMIS or LMAIS = cold Atom Ion Source = gas Field Ion Source = plasma Ion Source Adapted from and Courtesy of John Notte L. Bischoff, et al., Liquid metal alloy ion sources...
Proceedings Papers

ISTFA2021, ISTFA 2021: Tutorial Presentations from the 47th International Symposium for Testing and Failure Analysis, n1-n72, October 31–November 4, 2021,
... Ion Source): +30 kV Source Base Reservoir Heater Emitter Extractor +25 kV The Gallium LMIS represents >95% of the FIB Sources in use today. Variants include liquid metal alloys such as Si-Au, In-BiLi, and ionic liquids. +30 kV Source Base Extractor Trimer: The emission pattern from the atomic...
Proceedings Papers

ISTFA2023, ISTFA 2023: Tutorial Presentations from the 49th International Symposium for Testing and Failure Analysis, q1-q77, November 12–16, 2023,
... Ion Beams by Smith, Notte, Steele. MRS Bulletin 39, 2014. 7 Periodic Table of Available FIB Species = LMIS or LMAIS = cold Atom Ion Source = gas Field Ion Source = plasma Ion Source Adapted from and Courtesy of John Notte L. Bischoff, et al., Liquid metal alloy ion sources An Alternative for Focused...
Proceedings Papers

ISTFA2024, ISTFA 2024: Tutorial Presentations from the 50th International Symposium for Testing and Failure Analysis, x1-x68, October 28–November 1, 2024,
...: The emission pattern from the atomic sites of the GFIS Source +5 kV Plasma Ion Source: Split Faraday Shield Gas Feed Dielectric Plasma Chamber RF Current Extraction Electrode The Gallium LMIS represents >95% of the FIB Sources in use today. Variants include liquid metal alloys such as Si-Au, In-Bi-Li...
Proceedings Papers

ISTFA2012, ISTFA 2012: Conference Proceedings from the 38th International Symposium for Testing and Failure Analysis, 26-29, November 11–15, 2012,
... of the novel Xe plasma FIB/SEM instrument are shown with respect to the failure analysis. The performance of the instrument is tested and discussed in comparison to gallium liquid metal ion source FIB systems. Results show that the Xe plasma FIB offers much higher milling rate, greatly reducing the time...
Proceedings Papers

ISTFA1996, ISTFA 1996: Conference Proceedings from the 22nd International Symposium for Testing and Failure Analysis, 95-100, November 18–22, 1996,
... parameters for FIB etching are given in Table 2. During FIB etching, sample should be tilted a few degrees from the axis of the incident beam direction. Table 2. Typical Operation Parameters for FIB Milling Equipment Ion Source Accelerating Voltage Probe Current Base Pressure Total Fabrication Time 120 Min...
Proceedings Papers

ISTFA2017, ISTFA 2017: Conference Proceedings from the 43rd International Symposium for Testing and Failure Analysis, 238-245, November 5–9, 2017,
... sharp, provide a sufficient secondary electron yield for great imaging and good precursor gas activation, produce surface sputtering and implantation only where or when you wanted it, and be totally non-contaminating. The LMIS (liquid metal ion source) column FIB has been the mainstay of chip edit...
Proceedings Papers

ISTFA2011, ISTFA 2011: Conference Proceedings from the 37th International Symposium for Testing and Failure Analysis, 40-45, November 13–17, 2011,
... magneto optical ionization source (MOTIS), multicusp plasma ion source, and alloy liquid metal ion sources [4-7]. Gas Field Ion Source (GFIS) 1. Helium GFIS Since its official launch in 2007, helium ion microscope (HIM) has attracted a lot of attention from scientists in various fields. The HIM...
Proceedings Papers

ISTFA2004, ISTFA 2004: Conference Proceedings from the 30th International Symposium for Testing and Failure Analysis, 338-345, November 14–18, 2004,
... was accordingly modified (see Fig. 1 and Table 1). BAL-TEC AG, Balzers, Fürstentum Liechtenstein, accomplished the engineering part using one of their ion milling systems (model RES 100). The developed configuration involves two ion beam sources and an adapted sample holder allowing to load complete embedded...
Proceedings Papers

ISTFA2020, ISTFA 2020: Papers Accepted for the Planned 46th International Symposium for Testing and Failure Analysis, 325-329, November 15–19, 2020,
... Focused Ion Beam (FIB) is widely used to prepare in-situ TEM sample. Since Gallium easily forms alloys with many metals in low quantities [8,9], the experiment to understand the impact of gallium which is from sample preparation process on Cu layer was performed. Xenon plasma Focused Ion Beam (PFIB...
Proceedings Papers

ISTFA2012, ISTFA 2012: Conference Proceedings from the 38th International Symposium for Testing and Failure Analysis, 379-382, November 11–15, 2012,
.... coating crystalline silver-gallium failure analysis focused ion beam mechanical properties metallic nanoneedles nano-fork gripper sample preparation transmission electron microscope tungsten probes Metallic Nanoneedles Arrays for TEM Sample Preparation Lift-Out Romaneh Jalilian, David Mudd...
Proceedings Papers

ISTFA1998, ISTFA 1998: Conference Proceedings from the 24th International Symposium for Testing and Failure Analysis, 127-130, November 15–19, 1998,
... different approach in FIB chip repair and debug. The FIB System Tests performed for the data collection portion of this paper were done on a Micrion 9000 series FIB equipped with a 10nm Gallium LMIS (liquid metal ion source), operating at 30kv. Base system pressure as recorded by a CCIG was on the order...
Proceedings Papers

ISTFA2022, ISTFA 2022: Tutorial Presentations from the 48th International Symposium for Testing and Failure Analysis, i1-i69, October 30–November 3, 2022,
... in a Laser? ISTFA 2022 66 Alternative FIB Source Technology Liquid Metal Ion Source (Ga, Alloy) Gas Field Ionization Source (He, Ne, N, H) LMIS GFIS MOTIS Plasma Magneto-Optical Low Temp Inductive Coupled (or ECR) (Li, Cr, Cs, Nobel Gas) Plasma Source (Xe, N, O, Ar) S. Tan, R. Hallstein, R. Livengood, GFIS...
Proceedings Papers

ISTFA2021, ISTFA 2021: Tutorial Presentations from the 47th International Symposium for Testing and Failure Analysis, h1-h113, October 31–November 4, 2021,
... & processing (dual beam w/Ga (60+ papers & posters at FEBIP 2018) Beryllium, Silicon, Gold, Cr, AuSi, AuBeSi, etc. (LMAIS metal alloy) being investigated for specific applications. Lithium & Cesium cold ion beam sources in development phase. ISTFA 2021 102 Alternative FIB Source Technology Liquid Metal...
Proceedings Papers

ISTFA2007, ISTFA 2007: Conference Proceedings from the 33rd International Symposium for Testing and Failure Analysis, 242-251, November 4–8, 2007,
.... Failure can occur due to problems within a cell, or because of external factors that affect a cell. The Li-ion cell(s) are typically located inside portable products. Li-ion cells can be packaged in either a plastic laminate covered foil pouch, or in a metal (aluminum or steel) housing. Metal housed cells...
Proceedings Papers

ISTFA2024, ISTFA 2024: Tutorial Presentations from the 50th International Symposium for Testing and Failure Analysis, u1-u74, October 28–November 1, 2024,
..., AuBeSi, LiSiBi (shown by Raith) etc. (LMAIS metal alloy) being investigated for specific applications. Lithium & Cesium cold ion beam sources in development phase (NIST, Zero-K) Toss in a Laser? ISTFA 2024 71 Alternative FIB Source Technology Liquid Metal Ion Source (Ga, Alloy) Gas Field Ionization...
Proceedings Papers

ISTFA2014, ISTFA 2014: Conference Proceedings from the 40th International Symposium for Testing and Failure Analysis, 255-260, November 9–13, 2014,
... Abstract A Plasma-source focused ion beam (Helios PFIB) DualBeam™ microscope with sub-nanometer 1kV SEM resolution was used to investigate the structure of a state-of-the-art organic light-emitting diode (OLED) display. The capability of the Helios PFIB to produce and manipulate millimeter...
Proceedings Papers

ISTFA2021, ISTFA 2021: Conference Proceedings from the 47th International Symposium for Testing and Failure Analysis, 190-195, October 31–November 4, 2021,
... using a ThermoFisher ScientificTM Helios NanoLab 1200AT DualBeam TM with a Gallium liquid-metal ion source. The 190 equipment includes a multiple line gas injection delivery system (MultiChem) and a gas injection system (GIS), both allowing ion and electron beam-induced deposition and selective etching...
Proceedings Papers

ISTFA2005, ISTFA 2005: Conference Proceedings from the 31st International Symposium for Testing and Failure Analysis, 451-456, November 6–10, 2005,
... capillary column. It is within this column that the sample is separated in a process analogous to distillation. Each of the components of the complex mixtures pass into the mass spectrometer as a clean, unique substance, and are ionized within the ion source of the mass spectrometer. The fragments...