Abstract This paper provides an overview of the semiconductor analysis process at BMW. It explains how it was developed and how it differs from the failure analysis process used in semiconductor fabs. It describes the general process flow from first analyses through descending levels of localization at different length scales. It discusses sample preparation procedures, test methods and equipment, and advanced techniques. In the work presented here, the authors explain how they combined ToF-SIMS with STEM lamella preparation in a FIB-SEM, which allowed them to correlate concentration variances in an underlying layer with surface anomalies discovered during light microscope inspection.

Abstract This paper discusses the implementation of GHz-Scanning Acoustic Microscopy (GHz-SAM) into a wafer level scanning tool and its application for the detection of delamination at the interface of hybrid bonded wafers. It is demonstrated that the in-plane resolution of the GHz-SAM technique can be enhanced by thinning the sample. In the current study this thinning step has been performed by the ion beam of a ToF-SIMS tool containing an in-situ AFM, which allows not only chemical analysis of the interface but also a well-controlled local thinning (size, depth and roughness).

Abstract This presentation demonstrates how Time-of-Flight Secondary Ion Mass Spectroscopy provides unique information to identify suspect counterfeit semiconductor devices. An example is shown where the epitaxial layers of a light emitting device (LED) do not match those of the exemplar. Keywords: Secondary Ion Mass Spectroscopy, SIMS, counterfeit detection, LED, Light emitting diode.

Abstract Contamination and particle reduction are critical to semiconductor process control. Lots of failure analysis had been focused on finding the root cause of the particle and contamination. The particle and contamination effect were also easily found in circuit probing (CP) process, and therefore induced yield loss and wafer scrap. In the first part of this paper, an oven contamination case was studied. The second part of this paper focus on oven contamination monitoring. In the beginning, a die flying failure was papered at the stage of blue tape and die sawing. This event clearly indicated bad adhesion between die and plastic tape. This bad adhesion was suspected to be a particle/contamination layer formed on bad die surface. Three failure analysis (FA) approaches were performed to find out the root cause. The SEM/EDS result identified the main elements of big particle, but that is insufficient to identify the root cause. The OM/FTIR, however, showed the contamination may be related to polydimethylsiloxane (PDMS). The last failure analysis was the time of fly Secondary Ion Mass Spectrometer (TOF-SIMS), the result confirmed that there was a thin PDMS layer formed on the contaminated bad die surface. The high temperature CP process induced PDMS is believed to be the contamination root cause. In order to prevent the oven contamination event, a methodology based on contact angle and wettability of Si matrix sample was set up for regular monitor in oven operation. The details of contact angle test (CAT) sample preparation, measurement and analysis results were also discussed in this paper.

Abstract In this study, a comprehensive investigation of the Ag-Al bond degradation mechanism in an electrically failed module using the argon ion milling, scanning electron microscopy (SEM), dual beam focused ion beam-SEM, scanning transmission electron microscopy energy dispersive x-ray spectroscopy, and time-of-flight secondary ion mass spectrometry is reported. It is found that the bond degradation is due to the galvanic corrosion in the Ag-Al bonding area. Specific attention is given to the information of microstructures, elements, and corrosive ions in the degraded bond. In this study, it is believed that the Ag-Al bond degradation is highly related to the packaging designs.

Abstract Aluminum-copper alloys are popular for many applications that take advantage of the combination of properties in the alloys. This paper describes the use of multiple advanced failure analysis tools to analyze the physical and chemical properties of Al-Cu alloy thin films.

Abstract A particular failure analysis case where phosphorous contamination occurred in arsenic-implanted Si is presented. Time-of-Flight secondary ion mass spectroscopy (TOF-SIMS) can be used for fast diagnosis of this contamination which shows 300% surface density change relative to the baseline. It is found that the cause of the phosphorous contamination is due to a combination of implanter chamber re-deposit cross contamination and rapid thermal annealing (RTA) process induced drive-in effect.

Abstract One challenge in failure analysis of microelectronic devices is the localization and root cause finding of leakage currents in passives. In this case study we present a successful approach for failure analysis of a diode leakage failure. An analytical flow will be introduced, which contains standard techniques as well as SQUID (superconducting quantum interference device) scanning magnetic microscopy and ToFSIMS as key methods for localization and root cause identification. [1]

Abstract A failure analysis flow is developed for surface contamination, corrosion and underetch on microchip Al bondpads and it is applied in wafer fabrication. SEM, EDX, Auger, FTIR, XPS and TOF-SIMS are used to identify the root causes. The results from carbon related contamination, galvanic corrosion, fluorine-induced corrosion, passivation underetch and Auger bondpad monitoring will be presented. The failure analysis flow will definitely help us to select suitable methods and tools for failure analysis of Al bondpad-related issues, identify rapidly possible root causes of the failures and find the eliminating solutions at both wafer fabrication and assembly houses.

Abstract A new via interconnect failure mode found in organic light emitting diode (OLED) displays has been documented. Physical appearance, electrical performance, response to environmental stresses and root cause analyses have been studied using both simplistic and sophisticated failure analysis tools including focused ion beam etching and time of flight secondary ion mass spectroscopy (TOF-SIMS).

Abstract In failure analysis of wafer fabrication it is difficult to identify possible sources of carbon-related contaminants as most of them are from polymers, organic and complex compounds. In this paper, the fingerprints of EDX, FTIR, XPS and TOFSIMS techniques will be introduced so as to identify sources of carbon-related contaminants. For example, Si peak (1.740 keV) can be used as a fingerprint of EDX technique to identify the ink-related contaminant from the other carbon-related contaminants. FTIR spectra of more than 10 possible materials from wafer fab and assembly processes are discussed, which may be used as the fingerprints of FTIR technique to identify carbon-related contaminants. The C=O functional group and the PDMS (PolyDimethylSiloxane) are recommended as the fingerprints of XPS and TOF-SIMS techniques to identify source of carbon-related contaminants, respectively. In this paper, some application cases will be also discussed.

Abstract Airborne molecular contamination poses a serious problem for advanced wafer fabrication as the devices are continually scaled down. The amount of this contamination may be only a few monolayers, which are extremely difficult to detect by the commonly used analytical techniques, such as FTIR. ToF-SIMS has extremely high surface sensitivity for the analysis of trace contaminants on wafer surfaces. The high mass resolution of ToF-SIMS is also a powerful tool for the identification of the contaminants. In the current study, ToF-SIMS is used to monitor the build-up of airborne amine contamination on Black Diamond1 surfaces. It has been found that cleaning of the Black Diamond surfaces using wet chemicals can lead to photoresist poisoning. Thermal desorption-GC-MS analysis revealed that wet cleaning would result in the accumulation of hydrocarbons on the Black Diamond surfaces. ToF-SIMS shows that amines can build up gradually on the Black Diamond surfaces after wet cleaning, probably via airborne molecular contamination. For the Black Diamond wafers which did not go through the wet cleaning process, there was no significant increase of amines on the wafer surfaces. The amount of amines on the Black Diamond surfaces depends on the chemicals used in the cleaning processes and the wafer storage conditions. The level of amine contamination can be significantly reduced after the samples are heated up to 300°C for a few minutes in inert atmosphere.

Abstract In the authors' previous paper, we studied the defects from Fluorine-Induced Corrosion on microchip Al bondpads using SEM, EDX, TEM, AES, IC, XPS and TOF-SIMS techniques. An unknown F-Al compound was found and identified as [AlF6]3-. In this paper, we will further study the chemical mechanisms of Fluorine-Induced Corrosion on microchip Al bondpads and propose a theoretical electrochemical model to reveal the secrets of Fluorine-Induced Corrosion on Al bondpads. To support this new theoretical model, we will provide substantiating data from TOFSIMS analysis and other failure analysis techniques. According to the theoretical model of Fluorine-induced Corrosion proposed, fluorine contamination on Al bondpads will cause two types of corrosions. First, fluorine reacts with Al and forms a complex compound [AlF6]3- on the affected area, which we will refer to as Fluorine Corrosion. Once the compound of [AlF6]3- forms on Al bondpads, it will form an Anode and cause further electrochemical reactions from O2, N2 and H2O (moisture) at the Cathode. The new products of further electrochemical reactions will be [OH]- and [NH4]+ ions. The new product of [OH]- ions will react with Al and cause further Al corrosion on bondpads and form corrosive product consisting of Al(OH)3, which we will refer to as [OH]- Corrosion. The new product of [NH4]+ ions will combine with [AlF6]3- and form a corrosive complex compound (NH4)3(AlF6). This proposed corrosion mechanism results in non-stick bondpad problem.

Abstract Fluorine contamination on Al bondpads will result in corrosion, affect quality of bondpads and pose problem such as non-stick on pad (NSOP) during wire bonding at assembly process. In this paper, a fluorine contamination case in wafer fabrication will be studied. Some wafers were reported to have bondpad discoloration and bonding problem at the assembly house. SEM, EDX, TEM, AES and IC techniques were employed to identify the root cause of the failure. Failure analysis results showed that fluorine contamination had caused bondpad corrosion and thicker native aluminium oxide, which had resulted in discolored bondpads and NSOP. It was concluded that fluorine contamination was not due to wafer fab process, but was due to the wafer packaging foam material. XPS/ESCA and TOF-SIMS advanced tools were used to study the chemical and physical failure mechanism of fluorine-induced defects. An unknown Al compound was found using XPS technique and identified it as [AlF6]3- using electrochemical theories and TOF-SIMS technique. This finding was very significance, as it helped developing a theoretical electrochemical model for fluorine-induced corrosion and helped understanding of the mechanism of fluorine-induced corrosion on aluminium bondpads. It was found that fluorine contamination had formed [AlF6]3-on the affected bondpads and it had caused further electrochemical reactions and formed some new products of (NH4)+ and OH-. Then [AlF6]3- and (NH4)+ ions combined and formed a corrosive complex compound, (NH4)3(AlF6), while the OH- reacted with Al and caused further corrosion.