Presentation slides for the ISTFA 2024 Tutorial session “Correlative Microscopy: In-Situ AFM-in-SEM Introduction, Capabilities, and Case Studies Semiconductor Materials and Batteries.”

Presentation slides for the ISTFA 2024 Tutorial session “Review of Scanning Probe Microscopy Methods for Failure Analysis (2024 Update).”

Presentation slides for the ISTFA 2024 Tutorial session “Transmission Electron Microscopy.”

Presentation slides for the ISTFA 2024 Tutorial session “TEM Sample Preparation for Electron Microscopy Characterization and Failure Analysis of Advanced Semiconductor Devices.”

Presentation slides for the ISTFA 2024 Tutorial session “Advanced FIB/SEM Sample Preparation and Analysis Techniques (2024 Update).”

Presentation slides for the ISTFA 2024 Tutorial session “Basics and Current Aspects of Scanning Electron Microscopy.”

Presentation slides for the ISTFA 2024 Tutorial session “Transmission Electron Imaging AND Diffraction in an SEM (aka, STEM-in-SEM): What, Why, and How To Do This in Your Microscope.”

Presentation slides for the ISTFA 2023 Tutorial session “Review of Scanning Probe Microscopy Methods for Failure Analysis (2023 Update).”

Presentation slides for the ISTFA 2023 Tutorial session “Sample Preparation for Electron Microscopy Characterization (SEM and TEM) and Failure Analysis of Advanced Semiconductor Devices.”

Presentation slides for the ISTFA 2023 Tutorial session “TEM Techniques for Semiconductor Failure Analysis.”

Presentation slides for the ISTFA 2023 Tutorial session “In-situ Correlative AFM-SEM Characterization for Failure Analysis.”

Presentation slides for the ISTFA 2023 Tutorial session “Advanced FIB/SEM Sample Preparation and Analysis Techniques.”

Presentation slides for the ISTFA 2023 Tutorial session “Voltage Contrast within Electron Microscopy- From a Curious Effect to Debugging Modern ICs.”

Presentation slides for the ISTFA 2023 Tutorial session “EBIC in the TEM.”

Presentation slides for the ISTFA 2023 Tutorial session “On the Impact of Artificial Intelligence in Electrical Modes for Atomic Force Microscopies.”

Presentation slides for the ISTFA 2023 Tutorial session “Charged Particle Systems-Fundamentals and Opportunities.”

Presentation slides for the ISTFA 2023 Tutorial session “Basics and Current Aspects of Scanning Electron Microscopy (2023 Update).”

This presentation introduces the practice of focused ion beam (FIB) chip editing and its power and versatility as a problem-solving tool. It begins with a review of the features and functions of FIB systems, the role of gas chemistry in milling, etching, and deposition, and the use of IR imaging for navigation and targeting. It goes on to identify challenges due to packaging materials, chip-package interactions, and other factors, and in each case, provide alternate approaches and procedures to circumvent potential problems. It also covers advanced practices and methods and assesses potential future advancements.

This presentation covers the theory and practice of scanning transmission electron microscopy in a scanning electron microscope or STEM-in-SEM. It provides a detailed overview of the measurement physics, the equipment required, the importance of collection angle control, and contrast interpretation. It explains how and why different detectors are used and how they are calibrated. It addresses the issue of beam damage and explains how to quantify and deal with it. It also covers advanced concepts, including 4D STEM-in-SEM, nanoscale strain and temperature mapping, and the use of programmable STEM detectors for imaging and diffraction, and provides examples demonstrating the capabilities of the various measurement setups.

This presentation addresses topics of relevance to scanning electron microscopy, including SEM basics, electron guns, electron optics, beam-specimen interactions, signal detection, sample prep and cleanliness, low-voltage imaging, nonconductive imaging, voltage contrast, stage biasing, electron channeling contrast imaging, magnetic contrast imaging, STEM-in-SEM, 3D imaging and analytics, image post-processing, and automation.