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Proceedings Papers

Low Energy Xe + PFIB Specimen Preparation for Cs-Corrected HRSTEM Imaging

Lucille A. Giannuzzi, Paul A. Anzalone, Jiancun Rao, Tom Hoffman, Mike McKie ...
ISTFA2019, ISTFA 2019: Conference Proceedings from the 45th International Symposium for Testing and Failure Analysis, 241-243, November 10–14, 2019,
https://doi.org/10.31399/asm.cp.istfa2019p0241
Abstract
Abstract Low energy (i.e., 5 keV, 3 keV) Xe+ plasma FIB methods were applied to Si ex situ lift out specimens. Cs-corrected STEM imaging reveals the Si dumbbell structure indicating excellent surface quality achieved during the low energy polishing steps.
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