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Pavel Doleže
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Proceedings Papers
ISTFA2019, ISTFA 2019: Conference Proceedings from the 45th International Symposium for Testing and Failure Analysis, 219-222, November 10–14, 2019,
Abstract
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Abstract Multipurpose sample holder for advanced Transmission Electron Microscopy (TEM) sample preparation which reduces cost of the tool and most importantly simplifies the workflow is introduced. Following the current demand for user-friendly interface, semi-automated approach is aimed to be build up. Abilities to prepare advanced TEM lamellae in various geometries without rotary nanomanipulator and using various end-point detection signals are perceived as biggest advantages of this design.