Abstract In this paper, IR-LBIC (Infrared Light Beam Induced Current) is applied using the laser wavelength of 1064 nm in order to analyze polycrystalline thin-film solar cells. The spatially high-resolved map of the short circuit current (~3 µm) has been obtained by performing the IR-LBIC measurement. The results of the measurement showed higher signal response from the grain boundary compared to that from the grain interior. This difference has been explained by the light trapping effect due to the trench-shaped grain boundary profile, which is possibly accompanied by two stage excitation effects via electronic grain boundary states. It has been additionally investigated, whether LBIC measurement could be used to extract local illuminated cell characteristics. However, since the dark current, which has a decisive influence on the solar cell characteristic, is flowing in the entire cell area, this is not possible. A circuit network simulation demonstrates that LBIC cannot be used for extraction of the local open circuit voltage, and the short circuit current is the only parameter that can be locally defined and therefore clearly observed.