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Kouichi Sasaki
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Proceedings Papers
ISTFA2008, ISTFA 2008: Conference Proceedings from the 34th International Symposium for Testing and Failure Analysis, 265-268, November 2–6, 2008,
Abstract
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Abstract We have employed electroluminescence (EL) analysis of an edge-emitting laser diode (LD) to detect possible defects. To extract EL emission from a LD, we developed a tilt polish technique of the bottom electrode. We can successfully observed clear EL emission. A high yield of 99.2 % was achieved by the introduction of the precise tilt polish technique.
