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Jerrold P. Barone
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Proceedings Papers
ISTFA2008, ISTFA 2008: Conference Proceedings from the 34th International Symposium for Testing and Failure Analysis, 151-156, November 2–6, 2008,
Abstract
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Abstract Circuit Edit (CE) through a conductor requires an insulator to isolate the connection transiting the conductor. We investigate several recipes to determine not just the optimum recipe but also the latitude to provide a means of throughput optimization for a given edit requirement. The results show that trade-offs in deposition rate, robustness and isolation quality can be made to enable this throughput optimization.