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J.Y. Cho
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Proceedings Papers
ISTFA2010, ISTFA 2010: Conference Proceedings from the 36th International Symposium for Testing and Failure Analysis, 32-37, November 14–18, 2010,
Abstract
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Abstract In this paper, a mobile Diffractive Solid Immersion Lens (mDSIL) design is proposed to enhance spatial resolution for backside laser fault isolation techniques. By allowing for multiple failure sites analysis using a single DSIL, this design improves conventional static DSIL directly fabricated on silicon substrate. The feasibility of mDSIL is demonstrated experimentally and the resolution performance is shown to be comparable to a static DSIL.
