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Hidetaka Takato
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Proceedings Papers
ISTFA2018, ISTFA 2018: Conference Proceedings from the 44th International Symposium for Testing and Failure Analysis, 530-533, October 28–November 1, 2018,
Abstract
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Abstract The carrier distribution in solar cell is important evaluation target. Scanning nonlinear dielectric microscopy is applied to the cross section of phosphorus implanted emitter in monocrystalline silicon solar cell and visualizes the carrier distribution quantitatively. The effective diffusivities of phosphorus are estimated from the experimental results. Then, the three-dimensional carrier distribution is simulated. The experimental and simulation results show good correlation.
