Defect Localization Methods for Device Characterization and Yield Management

ISTFA 2024

October 28–November 1, 2024

San Diego, California, USA

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PROCEEDINGS PAPER

Greg Johnson

Carl Zeiss Microscopy

,

Poughkeepsie, NY, United States

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Paper No: istfa2024tpj1, pp. j1-j127; 127 pages

https://doi.org/10.31399/asm.cp.istfa2024tpj1

Published Online: October 28 2024

Abstract

Presentation slides for the ISTFA 2024 Tutorial session “Defect Localization Methods for Device Characterization and Yield Management.”

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2024

ASM International

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