Presentation slides for the ISTFA 2023 Tutorial session “Sample Preparation for Electron Microscopy Characterization (SEM and TEM) and Failure Analysis of Advanced Semiconductor Devices.”

failure analysis, sample preparation, scanning electron microscopy, semiconductor devices, transmission electron microscopy
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2023
ASM International
Topics
Scanning electron microscopy Transmission electron microscopy Semiconductor wafer fabrication
Issue Section:
Microscopy
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