We introduce a laser tool for producing cross-sectional and block cuts of cubic millimeter dimensions in advanced packages and other samples. PolarisTM is an alternative to mechanical polishing and can create samples of arbitrary shapes including block cut-outs and window cuts. The tool uses a femtosecond laser for ablation to reduce thermal effects on the sample. To further control the sample temperature, the tool can also cut samples that are submerged in water. We show results cutting in advanced packages with minimal damage at high speed, typically greater than 1 mm3/min.

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