Spatial Resolution Enhancement of Time-Resolved Photon Emission Imaging with Superconducting Nanowire Single Photon Detector

High-speed time-resolved emission analysis is an attractive failure analysis technique because of its non-invasiveness. Super-conductive nanowire single photon detector (SNSPD or SSPD) is a key candidate of key device for time-resolved emission analysis. In this paper, we demonstrate time-resolved emission and its application of spatial resolution enhancement. We could confirm that time-resolved emission imaging can enhance spatial resolution by simple mathematical operations compared to static emission analysis, which is effective for finding emission spots before detailed time-resolved data investigations.