This presentation covers ion beam analytical tools, their capabilities, and uses. It provides an overview of ion sources, examines emerging trends in surface analysis, and assesses the potential of ultrafast lasers for panoscopic patterning, athermal ablation, and elemental analysis. It compares and contrasts liquid metal, gas field, and plasma sources and presents examples highlighting the capabilities of FIB-SIMS and FIB-SEM Auger/XPS surface analysis techniques. It also introduces computationally guided microspectroscopy (CGM) and assesses its potential impact on multi-variant analysis, point spread deconvolution, and compressed sensing.

ablation, delayering, imaging, ion beam sources, plasma FIB, SIMS spectroscopy, surface analysis
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2022
ASM International
Topics
Milling Focused ion beam tomography Semiconductor wafer fabrication Secondary ion mass spectrometry Surface analysis
Issue Section:
Microscopy
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