Review of Scanning Probe Microscopy Methods for Failure Analysis

This presentation provides an introduction to atomic force microscopy (AFM) and its many uses in semiconductor failure analysis. It provides examples showing how AFM is used to obtain information on electric fields, surface potential, current, resistance, capacitance, impedance, carrier concentration, mechanical contact (height and energy dissipation), temperature, and composition. It also addresses a number of related issues including the use of external stimuli, sample preparation requirements, and probe tip selection.