This presentation is a pictorial overview on the implementation of lock in thermography, the various types of images that can be obtained, and the interpretation of the results. It also includes a refresher on the use of discrete Fourier transforms (DFT) in signal processing.

amplitude image, discrete Fourier transforms, lock-in thermography, phase image, thermal dissipation analysis
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2022
ASM International
Topics
Semiconductor wafer fabrication Temperature Thermography
Issue Section:
Fault Isolation
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